Download e-book for kindle: Advanced Metallization & Interconnect Systems for Ulsi by Robert Havemann, John Schmitz, Hiroshi Komiyama, Kazuo

By Robert Havemann, John Schmitz, Hiroshi Komiyama, Kazuo Tsubouchi

ISBN-10: 1558993851

ISBN-13: 9781558993853

The MRS Symposium continuing sequence is an across the world acknowledged reference appropriate for researchers and practitioners.

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Additional resources for Advanced Metallization & Interconnect Systems for Ulsi Applications in 1996: Materials Research Society Conference Proceedings

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The first two of these papers were devoted to experimental measurements of spectral characteristics and the second two present results of semiempirical cluster calculations of the electronic structure and chemical bonding for hexagonal Mo 2 C, MoC and cubic MoC. ,Mo4d and Mo4d,Mo5s) valence structure, typical for carbides was obtained. The metal band broadens as the C/Mo ratio increases. The interatomic bonding in these carbides appears to be of combined metalliccovalent character. These conclusions were justified by self-consistent calculations of Mo 3 C 1 4 clusters in MoC by the Xa DV (discrete variational) method of Ellis and Painter (1970).

The Vs- and Vp-orbitals give relatively small contributions to the carbide valence band and to the band of quasi-core C2s states. Consequently, both for the B2 carbides and their Bl analogues most of the interatomic bonding is determined by the Md-C2p hybridisation and by additional M-M interactions. The latter become more important when the metal band becomes occupied as the valence of the metal atoms increases. 1 £,Ry Fig. 9 Electronic structure of B2 VC: (a) total DOS (solid curve) and total number of states depending on energy (dotted curve).

1. 95 Mbar and the highest metallicity of chemical bonding. -WC bulk modulus is comparatively small. -WC to be inferior to those of a-WC. 9 Ry higher than that of a-WC. The experimental data show that at room temperatures jS-WC is certainly metastable and can be produced by rapid cooling after a sintering procedure (Willens, Buehler and Matthias, 1967). More detailed investigations of cubic WC by a pseudopotential localorbital method were undertaken later by Liu and Cohen (1988) while hexagonal WC was studied by Liu, Wentzcovitch and Cohen (1988).

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Advanced Metallization & Interconnect Systems for Ulsi Applications in 1996: Materials Research Society Conference Proceedings by Robert Havemann, John Schmitz, Hiroshi Komiyama, Kazuo Tsubouchi


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